During this paper, The brand new lapping slurry and sprucing slurry are introduced. Plus the deliquescence diploma of CLBO is fallen to cheapest. A different Performing know-how can be adopted. After tough polishing, the focus of ultra-precision polishing slurry is elevated properly. So does the extremely-precision sharpening speed, as well as wiping velocity is faster compared to the deliquescence velocity. The CLBO crystal surface area roughness can reach 1nm and preserve the area top quality nicely. Entry as a result of your establishment
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We summarized The existing development position from the superior-electricity DUV laser both of those at the wavelength of FHG from the one-μm laser and at 193 nm. The new improvement of the reliable-condition/fiber laser, plus the nonlinear optical crystals, prompts not merely the normal electricity and also the beam good quality (coherence) of your DUV lasers to an unparalleled stage.
For instance, The existing concave OC could be replaced by a airplane mirror which could mitigate the power density over the surface area of M1 plus the diamond. Furthermore, employing significant damage threshold coatings for M1 and diamond would also Enhance the output electric power with none damages. Then, the NIR laser at the 2nd Stokes wavelength could possibly be significant more than enough, along with its great beam quality, to make the final DUV laser at 193 nm that has a superior average electricity.
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Mainly because of the thermal lens impact in the sound-point out lasers, In the event the heating management is insufficient, It is far from straightforward to acquire the solid-condition laser that has a higher power as well as a superior beam high quality concurrently. Recently, with the development of The skinny disk laser and single-crystal fiber (SCF) laser, a large-electric power laser at the elemental wavelength (one μm) had been realized with a good beam high quality even with a TEM00 manner beam [four,24], which would be excellent candidates for the fundamental on the DUV laser era. One more candidate for the elemental is definitely the higher-electricity fiber laser which could possibly be achieved by coherent beam combination with M2 benefit fewer than 1.
On the other facet, the facility scaling with the NIR laser is an additional element to enhance the regular energy from the 193-nm DUV laser. Mainly because of the insufficient the superior-energy amplification Option of the NIR laser (by way of example at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) can be placed on create a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength along with acquiring relative better power [21]. Lately, a diamond Raman laser confirmed its skill in achieving a higher energy and a substantial conversion performance for the 1st Stokes of your one-μm laser [22,23], which suggests the possibility to become applied during the 193-nm DUV laser era as a result of its higher Raman attain and huge frequency change.
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The heart beat length of the next Stokes mild was shortened to 5 ns as shown in Determine 7a, just one-shot photograph from the oscilloscope, that is a typical phenomenon in Raman laser [forty four] while the pulse length with the pump laser was ten ns.
In click here addition, combining the stable-point out laser with other nonlinear procedure for example stimulated Raman scattering, NIR lasers may very well be accomplished at new wavelengths with large electricity and high beam quality, which was tested from the proof-of-principle experiment. This Raman laser scheme offers a fresh route to the higher-electrical power DUV laser, Specifically on the wavelength of 193 nm.
The beam profile revealed in Determine 7b shown a good beam high quality as one of several merits of Raman laser, which would be helpful to deliver a 193-nm DUV laser with a top quality beam.
Its UV absorption edge reaches a hundred and eighty nm. The productive nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about twice as significant as that of KDP. CLBO crystals might be grown through the stoichiometric melt with decrease viscosity.
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